Nanostructures and Properties of Vanadium Oxide Thin Film Preparedby Spray Pyrolysis Method

In this research, we reported structural, optical and morphological properties of va nadium oxide thin films directly grown on the glass substrates by fully automated spray pyrolysis equipment. The substrate temperature was set at 450 C and the nozzle to substrate distance was optimized to be 20 cm. The precursor solution was prepared as 0.05 M by mixing 0.393 gr of vanadium trichloride (VCl 3) in 50 mL of deionized water. The deposition parameters were 5 mL in 1 minute solution flow rate, 90 position of spray nozzle towards the substrate. Atmospheric air was used as carrier gas with 2.5 mbar pressure. Nanostructures and optical properties of as-grown films examined using X-ray diffraction (XRD), scanning electron microscopy (SEM) and UV-visible spectrophotometer techniques. After thin films annealed at 500 C, SEM, XRD and absorption measurements were taken again. The obtained results were compared.