ANNEALING PROCESS EFFECT ON TUNGSTEN DOPED ZnO THIN FILMS
Özet
Tungsten transition metal doped ZnO (ZnO:W) nanostructure was grown by Radio Frequency (RF)
Sputtering technique under 14mtorr grown pressure on glass substrate at 450 o C grown temperature.
The change in the structural and optical properties of the crystal structure with the annealing process
was investigated in detail. ZnO:W were analyzed through Scanning Electron Microscopy (SEM), X-ray
Diffraction (XRD) by operating Cu-Kα lines (λ = 1.5406 Å), for structural analysis. Absorption method
(UV–VIS) has been operated for examination of optical properties. ZnO: W thin films have hexagonal
crystal structure and P63mc space group (a (Å) = b (Å):3,24, c (Å):5,17). XRD measurement of the
ZnO:W thin films peak has been observed at angle of 34.43°, 34.75° also FWHM size of 0,98 ; 0,49 for
the ZnO:W and annealed at 550 oC ZnO:W , respectively. Absorption measurement of the ZnO:W thin
films band gab has been observed at of 3,15eV ;3.25eV for the ZnO:W and annealed at 550 oC ZnO:W ,
respectively. Structural and morphological changes in thin film depending on the annealing process has
been observed with the SEM measurements. Results from SEM images are compatible with XRD and
absorption measurements.
Keywords: ZnO, Tungsten, Magnetron Sputtering,
Atıf için künye
Sarıtaş, S., Turgut, E., Gürbulak, B., Kundakçı, M., & Yıldırım, M. (2022). ANNEALING PROCESS EFFECT ON TUNGSTEN DOPED ZnO THIN FILMS. 2ND INTERNATIONAL AZERBAIJAN CONGRESS ON LIFE, SOCIAL, HEALTH, AND ART SCIENCES, Baku (ss. 153–158).
BibTeX
@inproceedings{saritas2022-63698,
author = {Sarıtaş, Sevda and Turgut, Erdal and Gürbulak, Bekir and Kundakçı, Mutlu and Yıldırım, Muhammet},
title = {ANNEALING PROCESS EFFECT ON TUNGSTEN DOPED ZnO THIN FILMS},
booktitle = {2ND INTERNATIONAL AZERBAIJAN CONGRESS ON LIFE, SOCIAL, HEALTH, AND ART SCIENCES},
address = {Baku},
year = {2022},
pages = {153--158},
url = {https://akademik.atauni.edu.tr/yayinlar/63698-annealing-process-effect-on-tungsten-doped-zno-thin-films}
}