SnO2 Ultra-Thin Film Gas Sensor Fabricated by Ultrasonic Spray Pyrolysis (USP) Method
Özet
© 2022 American Institute of Physics Inc.. All rights reserved.In this study, SnO2: Sn films were produced by ultrasonic spray pyrolysis technique. Extremely transparent and conductive SnO2 thin films were deposited with SnCl2 as the precursor solution and optimum preparation conditions were achieved. Transparent Conductive Oxide (TCO) materials have some advantages compared to other types of semiconductors such as simple and small structure, low cost and ease of sensor applications in the working environment. Structural etc. properties of tin oxide thin films synthesized at 400°C were investigated. XRD results showed that ultra-thin SnO2 films were produced via ultrasonic spray pyrolysis. Sensor test results show that these films react to H2 gas and that film thickness has an effect on sensor performance.
Atıf için künye
Sağlam, H. K., MASAT, M., & ERTUĞRUL, M. (2020). SnO2 Ultra-Thin Film Gas Sensor Fabricated by Ultrasonic Spray Pyrolysis (USP) Method. 4th International Symposium on Advanced Materials and Nanotechnology, iSAMN 2020, Serdang. https://doi.org/10.1063/5.0084305
BibTeX
@inproceedings{saglam2020-198254,
author = {Sağlam, Hilal Kübra and MASAT, Mehmet and ERTUĞRUL, Mehmet},
title = {SnO2 Ultra-Thin Film Gas Sensor Fabricated by Ultrasonic Spray Pyrolysis (USP) Method},
booktitle = {4th International Symposium on Advanced Materials and Nanotechnology, iSAMN 2020},
address = {Serdang},
year = {2020},
doi = {10.1063/5.0084305},
url = {https://akademik.atauni.edu.tr/yayinlar/198254-sno2-ultra-thin-film-gas-sensor-fabricated-by-ultrasonic-spray-pyrolysis-usp}
}