Deep Learning for Robust Defect Detection in SEM Wafer Images under Imbalanced Data Distribution

Kılıç, Rabiye; Sağlam, Hilal Kübra

Bildiri Tam Metin Bildiri Uluslararası 2026

Deep Learning for Robust Defect Detection in SEM Wafer Images under Imbalanced Data Distribution

2nd International Congress on Science and Technology (ICSAT 2026) ss. 133–137 · Erzurum · 07.05.2026–09.05.2026 · 07.05.2026

Atıf için künye

Kılıç, R., & Sağlam, H. K. (2026). Deep Learning for Robust Defect Detection in SEM Wafer Images under Imbalanced Data Distribution. 2nd International Congress on Science and Technology (ICSAT 2026), Erzurum (ss. 133–137).

BibTeX

@inproceedings{kilic2026-198251,
  author = {Kılıç, Rabiye and Sağlam, Hilal Kübra},
  title = {Deep Learning for Robust Defect Detection in SEM Wafer Images under Imbalanced Data Distribution},
  booktitle = {2nd International Congress on Science and Technology (ICSAT 2026)},
  address = {Erzurum},
  year = {2026},
  pages = {133--137},
  url = {https://akademik.atauni.edu.tr/yayinlar/198251-deep-learning-for-robust-defect-detection-in-sem-wafer-images-under-imbalanced}
}