Deposition of Nb Doped CrYN Thin Films: Investigation of Structural, Mechanical and Tribological Properties

Yüksel, Furkan; Gülten, Gökhan; Yaylalı, Banu; Totik, Yaşar; Efeoğlu, İhsan

Kitapta Bölüm Bilimsel Kitap Bölümü Uluslararası 2023

Deposition of Nb Doped CrYN Thin Films: Investigation of Structural, Mechanical and Tribological Properties

Furkan Yüksel, Gökhan Gülten, Banu Yaylalı, Yaşar Totik, İhsan Efeoğlu

Proceeding of 5th International Conference on Advances in Manufacturing and Materials Engineering ss. 1–667 · 2023

Özet

Hard coatings are generally applied to protect substrate surfaces from

damage or deterioration. The development of hard protective coatings is increasingly encouraged, as machine elements used in the defense industry, automotive,

aerospace, microelectronics and many other industrial applications require increasingly higher tribo-mechanical properties. Among these hard coatings such as CrN,

CrYN and CrAlYN, which are deposited by closed-field unbalanced magnetron

sputtering, which is one of the physical vapor depositions (PVD) techniques, are

preferred because of their superior mechanical and thermal properties. In this

study, Nb-added CrYN-based thin films were synthesized on 4140 (42CrMoS4),

Si and glass substrates by closed-field unbalanced magnetron sputtering (CFUBMS)

under different pressure, pulse frequency and pulse duty cycle. Scanning electron

microscopy (SEM), X-ray diffraction (XRD) and Energy dispersive spectroscopy

(EDS) were used to determine the structural features. The mechanical properties were

analyzed with microhardness tester and scratch tester. Tribological properties were

obtained by pin-on-disc method under atmospheric conditions at room temperature.

Atıf için künye

Yüksel, F., Gülten, G., Yaylalı, B., Totik, Y., & Efeoğlu, İ. (2023). Deposition of Nb Doped CrYN Thin Films: Investigation of Structural, Mechanical and Tribological Properties. Md. Abdul Maleque,Ahmad Zahirani Ahmad Azhar,Norshahida Sarifuddin,Sharifah Imihezri Syed Shaharuddin,Afifah Mohd Ali,Nor Farah Huda Abdul Halim (Ed.), Proceeding of 5th International Conference on Advances in Manufacturing and Materials Engineering (ss. 1–667). Springer Singapore.

BibTeX

@incollection{yuksel2023-190923,
  author = {Yüksel, Furkan and Gülten, Gökhan and Yaylalı, Banu and Totik, Yaşar and Efeoğlu, İhsan},
  title = {Deposition of Nb Doped CrYN Thin Films: Investigation of Structural, Mechanical and Tribological Properties},
  booktitle = {Proceeding of 5th International Conference on Advances in Manufacturing and Materials Engineering},
  editor = {Md. Abdul Maleque,Ahmad Zahirani Ahmad Azhar,Norshahida Sarifuddin,Sharifah Imihezri Syed Shaharuddin,Afifah Mohd Ali,Nor Farah Huda Abdul Halim},
  publisher = {Springer Singapore},
  year = {2023},
  pages = {1--667},
  isbn = {9789811995088},
  url = {https://akademik.atauni.edu.tr/yayinlar/190923-deposition-of-nb-doped-cryn-thin-films-investigation-of-structural-mechanical}
}