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Bildiri Tam Metin Bildiri Uluslararası 2022

The Mechanical and Tribological Properties of LaB6 Thin Films Deposited by Closed-Field Unbalanced Magnetron Sputtering

Gökhan GÜLTEN, Mustafa YEŞİLYURT, Banu Yaylalı, Yaşar Totik, İhsan EFEOĞLU

5th International Conference on Advances in Manufacturing and Materials Engineering, ICAMME 2022 ss. 245–250 · Kuala-Lumpur · 09.08.2022–10.08.2022 · 09.08.2022
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Özet

Increasing the performance and life of cutting tools in machining applications provides an important advantage in terms of efficiency and economy. Many functional hard coatings have been developed to increase the surface quality, service life and performance of cutting tools used in machining. Being a member of the rare earth metal hexaborides family, Lanthanum added B-based coatings are the subject of intensive R&D studies to be used in industry and strategic applications due to their high hardness, wear and corrosion resistance, and thermionic properties. In this study, LaB6 thin films were deposited on High-speed steel (AISI M2), Si and glass substrates by closed field unbalanced magnetron sputtering (CFUBMS) under different deposition pressure. The effects of deposition pressure on microstructure, mechanical and tribological properties were investigated. The characteristic properties and hardness of LaB6 thin films were characterized by X-ray diffraction (XRD) and microhardness testing, respectively. The bond strength (adhesion) between the substrate and the film was analyzed by the scratch test. The tribological properties of LaB6 films were determined with a pin-on-disk tribometer under atmospheric test conditions.

Anahtar kelimeler

Magnetron sputtering Deposition pressure LaB6

Atıf için künye

GÜLTEN, G., YEŞİLYURT, M., Yaylalı, B., Totik, Y., & EFEOĞLU, İ. (2022). The Mechanical and Tribological Properties of LaB6 Thin Films Deposited by Closed-Field Unbalanced Magnetron Sputtering. 5th International Conference on Advances in Manufacturing and Materials Engineering, ICAMME 2022, Kuala-Lumpur (ss. 245–250). https://doi.org/10.1007/978-981-19-9509-5_33

BibTeX
@inproceedings{gulten2022-190845,
  author = {GÜLTEN, Gökhan and YEŞİLYURT, Mustafa and Yaylalı, Banu and Totik, Yaşar and EFEOĞLU, İhsan},
  title = {The Mechanical and Tribological Properties of LaB6 Thin Films Deposited by Closed-Field Unbalanced Magnetron Sputtering},
  booktitle = {5th International Conference on Advances in Manufacturing and Materials Engineering, ICAMME 2022},
  address = {Kuala-Lumpur},
  year = {2022},
  pages = {245--250},
  doi = {10.1007/978-981-19-9509-5_33},
  url = {https://akademik.atauni.edu.tr/yayinlar/190845-the-mechanical-and-tribological-properties-of-lab6-thin-films-deposited-by}
}