Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique

Sürdürülebilir Kalkınma Amaçları

• SKA 9: Sanayi, Yenilikçilik ve Altyapı
• SKA 17: Amaçlar için Ortaklıklar

Atıf için künye

Polat, M. A., Efeoğlu, İ., Maleque, M. A., Gülten, G., Totik, Y., Hassan, M. H., & Zulkifli, N. W. (2023). Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique. Materials Open Research, 2(12), 1–8. https://doi.org/10.12688/materialsopenres.17622.1

@article{polat2023-190803,
  author = {Polat, Muhammet Alperen and Efeoğlu, İhsan and Maleque, Md Abdul and Gülten, Gökhan and Totik, Yaşar and Hassan, Masjuki Haji and Zulkifli, Nurin Wahidah},
  title = {Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique},
  journal = {Materials Open Research},
  year = {2023},
  volume = {2},
  number = {12},
  pages = {1--8},
  issn = {2754-7531},
  doi = {10.12688/materialsopenres.17622.1},
  url = {https://akademik.atauni.edu.tr/yayinlar/190803-characterization-of-tatan-multi-graded-thin-film-coating-synthesized-by-hipims}
}