Structural and Surface Characterization of PZT (52/48) Films Deposited by Spin Coating Method

In this study, PZT (lead zirconate titanate) films were deposited on (1 0 0) oriented p-type silicon substrates using the spin-coating method, a technique known for its ability to produce thin, uniform coatings. To evaluate the structural and optical properties of the films, a range of characterizations were performed, including x-ray diffraction (XRD), scanning electron microscopy (SEM), and absorbance measurements. The XRD analysis showed that the PZT peaks corresponded to the perovskite crystalline phase, confirming the successful deposition of PZT. SEM images revealed a homogeneous surface coating with a cracked structure, and the film thickness exhibited variations influenced by the number of spin cycles. Additionally, the absorbance measurements indicated an energy band gap of 3.65 eV for the films, suggesting their potential for optoelectronic applications. Notably, it was observed that both the film thickness and particle size increased as the number of spin cycles increased, highlighting the influence of the spin-coating process on the final film properties. © 2025 Institute of Electrical Engineers of Japan and Wiley Periodicals LLC.