A novel tuning method for repeatability problem solving of RF MEMS disk resonators

Despite of their very high quality factors, RF MEMS resonators suffer from repeatability problems which preventing them to be commercialized. This paper proposes a method for enabling RF MEMS resonators to become repeatable. The proposed method, utilizes recently demonstrated ring shape anchored contour mode disk resonator constructing from an AlN layer sandwiched between two thin polysilicon layers. The anchor is configured from the continuum ring to crossed ring providing distinct electrodes for applying controlling DC voltages. By such a method, process variations in 0.18 μm technology and below, can be compensated and one of the most significant bottlenecks in the way of commercializing RF MEMS resonators is vanished. © 2012 IFSA.