Article 2022 · 10 citations

A Comparative Study of the Mechanical and Tribological Properties of Thin Al<sub>2</sub>O<sub>3</sub> Coatings Fabricated by Atomic Layer Deposition and Radio Frequency Sputtering

Grilli, Maria Luisa, Valerini, Daniele, Rizzo, Antonella, Yilmaz, Mehmet, Song, Chen, Hu, Guohang, Mikhaylov, Alexey, Chierchia, Rosa, Rinaldi, Antonio

Abstract

Thin Al2O3 films (150 nm thick) are deposited by atomic layer deposition (ALD) and radio frequency sputtering on Si substrates and submitted to annealing in N-2 atmosphere at 900 degrees C for 90 min. X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy and energy dispersive X-ray spectroscopy (SEM-EDS), nanohardness, and fretting wear measurements are used to infer the structural, morphological, mechanical, and wear properties of the as-deposited and annealed films. Results show a higher hardness for the annealed coatings, being the hardness of the annealed ALD coating the highest (18.8 GPa). The measured mechanical properties convey clear trends of stiffening and hardening associated with selected process (ALD versus sputtering) and postprocessing (annealed versus unannealed).

Keywords

atomic layer deposition mechanical properties radio frequency sputtering thin Al2O3 coatings tribological properties ALUMINA COATINGS SUBSTRATE-TEMPERATURE CATALYTIC-PROPERTIES TRANSITION ALUMINAS FILMS SURFACE WEAR PERFORMANCE CORROSION TEMPLATE

WoS Categories

Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

Citation

Journal: PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Year: 2022
Volume: 219
Issue: 1
ISSN: 1862-6300
eISSN: 1862-6319
DOI: 10.1002/pssa.202100398
WoS UID: WOS:000717746100001

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