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Proceedings Paper 2021 · 2 atıf

Optical and morphological properties of the CdO thin films as a function of film thickness

Sakar, Betul Ceviz, Saritas, Sevda, Kundakci, Mutlu

Özet

It has been investigated the effect of film thickness on the optical and morphological properties of cadmium oxide (CdO) thin film. For this reason, transparent and conducting CdO thin films were deposited on glass substrates at 200 degrees C temperature using DC magnetron sputtering method. The power of the sputter in the experiment was set up to 100 W. In order to determine the morphological properties of the films, X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM) was used. Also optical band gap of the films was determined by using UV-VIS spectroscopy. The XRD results showed that the films were in polycrystalline cubic structure. It was concluding that the surface roughness values decrease with the increasing film thickness. The changes of optical band gap of the CdO thin films was stable for the thickness of 100 nm and 150 nm but the band gap value increase about 0.3 eV with the film thickness of 200 nm. (c) 2021 Elsevier Ltd. Selection and peer-review under responsibility of the scientific committee of the International Congress on Semiconductor Materials and Devices, ICSMD2018.

Anahtar Kelimeler
DC sputtering CdO Thickness Thin film SEM CADMIUM-OXIDE
WoS Kategorileri
Materials Science, Multidisciplinary
Künye
Dergi
MATERIALS TODAY-PROCEEDINGS
Yıl
2021
Cilt
46
Sayfa
6892-6894
ISSN
2214-7853
DOI
10.1016/j.matpr.2021.01.552
WoS UID
WOS:000685935700004
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