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Article 2021 · 33 atıf

Structural and optical properties of RF sputtered ZnO thin films: Annealing effect

Sener, Emre, Bayram, Ozkan, Hasar, Ugur Cem, Simsek, Onder

Özet

In this study, the effects of annealing temperature on morphological, optical and structural properties of Radio Frequency (RF) magnetron sputtered Zinc oxide (ZnO) thin films were investigated. X-ray diffraction spectra confirmed the hexagonal wurtzite structure with preferential orientation along the c axis. The annealing temperature had an important role on the crystallite size and it was calculated as 19.7 nm, 17.2 nm, 15.1 nm and 24.5 nm, depending on the increasing annealing temperature. The optical transmittance of ZnO thin films ranged from 85% to 95% at 550 nm wavelength, and this change occurred linearly with annealing temperature. The optical band gap (E-g) of pure ZnO was 3.25 eV; this first decreased to 3.23 eV at low annealing temperature and then increased linearly to 3.26 eV with increasing annealing temperature.

Anahtar Kelimeler
RF Magnetron sputter Annealing Wurtzite Zinc oxide ZINC-OXIDE FILMS ELECTRICAL-PROPERTIES HYDROTHERMAL SYNTHESIS PREFERRED ORIENTATION DOPING CONCENTRATION TEMPERATURE GROWTH PHOTOLUMINESCENCE NANOWIRES ELECTRODE
WoS Kategorileri
Physics, Condensed Matter
Künye
Dergi
PHYSICA B-CONDENSED MATTER
Yıl
2021
Cilt
605
ISSN
0921-4526
eISSN
1873-2135
DOI
10.1016/j.physb.2020.412421
WoS UID
WOS:000618825300001
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